Bias Power Systems
The PLASMATEC BIAS Unipolar / Bipolar outout from 20 up to 1000 V.
7.5 or 15 kW. (In parallel mode the power can be increased to 45KW)
- unipolar output frequency of 1 to 30 kHz
- bipolar output frequency is adjustable from 1 to 15 kHz.
- duty cycle from 1 to 95 %
- Positive and negative pulses have the same output voltage but the duty cycle can be adjusted separately.
The PLASMATEC BIAS supplies feature:
- a sophisticated flexible adjustable arc management
- a high power density and an incomparable robustness.
- Optimized for pulsed ion etching
- Better film density and adhesion
- Adaptable to a wide range of process requirements
- Multiple units combinable for high power requirements
- High performance DSP regulator